氣載微業(yè)潔凈等級（ISO 14644-1）

發(fā)布時間： 2014-09-16　　點擊次數(shù)： 1126次

SO Classification Number	Maxlmum Concentrationlimit(particles/M³of air) equal to or larger than considered sizes shown bolew
SO Classification Number	0.1um	0.2um	0.3um	0.5um	1um	5um
ISI01	10	2
ISI02	100	24	10	4
ISI03	1,000	237	102	35
ISI04	10,000	2,370	1020	352	83
ISI05	100,000	237,000	10,2000	3,520	832	29
ISI06	1,000,000	237,000	102,000	35,5200	8,320	293
ISI07				352,000	83,200	2,930
ISI08				3,520,000	832,000	29,300
ISI09				35,200,000	8,320,000	293,000

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